VIII International Conference on the Physics of Plasma Physics and Plasma Technologyсборник

Статьи, опубликованные в сборнике

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• • 2015 Current-pressure dependencies of DC magnetron discharge
  • Ryabinkin A.N., Mankelevich Yu A., Pal A.F., Serov A.O.
  • в сборнике VIII International Conference on the Physics of Plasma Physics and Plasma Technology, место издания Kovcheg, Minsk Minsk, с. 67
• • 2015 DC magnetron discharge for high-rate sputtering
  • Mitin V.S., Pal A.F., Ryabinkin A.N., Serov A.O.
  • в сборнике VIII International Conference on the Physics of Plasma Physics and Plasma Technology, место издания Kovcheg, Minsk Minsk, с. 449
• • 2015 Plasma glow intensity and target erosion depth distributions in magnetron sputter
  • Serov A.O., Mankelevich Yu A., Pal A.F., Ryabinkin A.N.
  • в сборнике VIII International Conference on the Physics of Plasma Physics and Plasma Technology, место издания Kovcheg, Minsk Minsk, с. 71