Proceedings of Advanced Metallization Conference (AMC), September 23-25 2008, San Diego California, USA, and October 8-10 2008, Tokyo, Japanсборник
Статьи, опубликованные в сборнике
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2008
Recombination Probabilities of О and Н Atoms on the Surface of Nanoporous Low-K SiOCH Dielectrics
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Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Malykhin E.M.,
Mankelevich Yu A.,
Rakhimova T.V.,
Rakhimov A.T.,
Vasilieva A.N.,
Zyryanov S.M.,
Baklanov M.R.
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в сборнике Proceedings of Advanced Metallization Conference (AMC), September 23-25 2008, San Diego California, USA, and October 8-10 2008, Tokyo, Japan, место издания San Diego California, USA, and Tokyo, Japan