Proceedings of International Symposium on Plasma Chemistry (ISPC 19), July 27-31 2009, Bochum, Germanyсборник

Статьи, опубликованные в сборнике

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• • 2009 Radical Production in RF CCP Discharge at 81 MHz Frequency in CHF3/Ar and CF4/Ar Mixtures. Theory and Experiment
  • Malykhin E.M., Braginsky O.V., Kovalev A.S., Lopaev D.V., Proshina O.V., Rakhimova T.V., Rakhimov A.T., Vasilieva A.N., Zyryanov S.M.
  • в сборнике Proceedings of International Symposium on Plasma Chemistry (ISPC 19), July 27-31 2009, Bochum, Germany, место издания Bochum, Germany, с. 362
• • 2009 The Spatial Distribution of Radicals in the Dual Frequency (1.76 MHz /81 MHz) Capacitive Discharge in CHF3/Ar and CF4/Ar Mixtures
  • Braginsky O.V., Klopovskiy K.S., Kovalev A.S., Lopaev D.V., Proshina O.V., Rakhimova T.V., Rakhimov A.T., Vasilieva A.N., Voloshin D.G.
  • в сборнике Proceedings of International Symposium on Plasma Chemistry (ISPC 19), July 27-31 2009, Bochum, Germany, место издания Bochum, Germany, с. 39