MRS Online Proceedings Libraryсборник
Статьи, опубликованные в сборнике
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2013
Effects of VUV and EUV Radiation on Ultra Low-k Materials Damage
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Oleg Braginsky,
Alexander Kovalev,
Dmitry Lopaev,
Yury Mankelevich,
Olga Proshina,
Tatyana Rakhimova,
Alexander Rakhimov,
Anna Vasilieva,
Sergey Zyryanov,
Mikhail Baklanov
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в сборнике MRS Online Proceedings Library, издательство Cambridge University Press (United Kingdom), том 1559, с. mrss13-1559-aa03-11
DOI