Modeling Aspects in Optical Metrology VIсборник

Статьи, опубликованные в сборнике

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• • 2017 Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer
  • Penttilä Antti, Maconi Göran, Kassamakov Ivan, Gritsevich Maria, Helander Petteri, Puranen Tuomas, Hæggström Edward, Muinonen Karri
  • в сборнике Modeling Aspects in Optical Metrology VI, место издания SPIE DOI