ИСТИНА

Compact CVD setup with embedded STM was built to provide STM measurements at the same 1µm × 1µm region on the sample surface before and after CVD synthesis. Proposed system can be used for different types of materials deposition, including graphene. CVD parameters for graphene formation were found. The structure peculiarities of graphene film were studied and it was discovered that graphene forms nanobubbles structure on highly polycrystalline Ni surface. The phenomenon of graphene nanobubbles recombination and merging under STM scanning with increased difference of potentials between sample and STM tip was also discovered. This phenomenon combined with build “CVD in STM” reactor leads to ability of fast and effective way to distinguish 2D from 3D structure of deposed material even without taking the sample out of the reactor.