ИСТИНА

The dependence of current-pressure (I-P) characteristics of DC magnetron discharge in inert gases (Ar, Kr and Xe) for various constant discharge voltages were investigated. Under certain conditions on the I-P characteristic the nonmonotonic region of local maximum followed by a minimum is observed. It is found that increasing mass of the working gas ions results in a shift of the local maximum to lower pressures. The spacial distribution of ions in the plasma was studied with optical emission spectroscopy. A qualitative model of the phenomenon is presented, that takes into account the discharge spacial structure transformation with pressure increasing and capturing of secondary electrons by the cathode.