ИСТИНА

Comprehensive experimental and theoretical study of dual frequency 81MHz & 13.56 MHz capacitive coupled plasma (DF CCP) discharges in CF4/Ar and CHF3/Ar mixtures has been curred out. Ion composition as well as the densities fo the main radicals were measured experimentally and compared with the Monte-Carlo model predictions. Vacuum ultra-violet (VUV) and UV emission spectra in 120 nm - 300 nm and the VUV photons fluences on the bottom electrode were measured. Ar VUV emission (104 nm & 106 nm) fluences were also obtained in the experiment and compared with the model calculations. All the compared experimental and model data are in a fair agreement.