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The magnetic and structural properties of the potential diluted magnetic oxide (DMO), i.e. Co implanted TiO2 thin films have been investigated. These films have been grown by magnetron sputtering on SrTiO3 single crystals. Avoidance of possible magnetic contamination has been verified by magnetometry measurements after substrate preparation and deposition. For magnetic doping, implantations of Co+ ions have been performed at atomic concentrations of 0.5%, 2.5% and 3% respectively. The dependencies between the fluence implanted, defect creation and ferromagnetic properties have been investigated using magnetometry, positron annihilation spectroscopy and structural characterization.