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We present and discuss a recent results on investigation of THz waves generation from nano- and microscale targets irradiated with femtosecond laser pulses, which is a continuation of our experiments on studies of interaction of high intensive short laser pulses with nano-cluster gas jet and free-falling single microdroplets. Both types of laser targets have been examined to generate THz and X-ray radiation under the same optical excitation with sub-TW laser systems.