ИСТИНА

Multilayer thin film optical coatings are key elements of many photonic devices. Structural and optical properties of thin film coatings depend on their fabrication conditions. Quite often the investigation of these properties presents a challenge for experimental techniques. Fortunately, due to the progress in high-performance computing supercomputer simulations can be used for investigating thin films structural properties. In the present work the full-atomistic molecular dynamic simulation approach is reported and the dependencies of thin film density, refractive index, concentrations and types of defects on fabrication conditions are studied.