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Evaluation of plasma density in CCP RF discharges by planar Langmuir probe: experiment and numerical simulationдоклад на конференции
- Авторы: Voloshin D., Rakhimova T., Proshina O., Kovalev A., Vasilieva A., Mankelevich Yu
- Конференция : The XXII Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
- Даты проведения конференции: 2014
- Тип доклада: не указан
- Докладчик: Voloshin D.
- Место проведения: Greifswald, Germany, Germany
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Аннотация доклада:
Experimental measurements of current-voltage relationship in RF CCP discharge in argon at 81 MHz have been performed by planar Langmuir probe. The high plasma density 1010 – 1011 cm-3 has been estimated at specific input power under study. The 2D numerical model of ion current collection by a planar probe has been developed on the base of the particle-in-cell with Monte-Carlo collision method for ions motion. This model is used to reveal the plasma density from ion part of I-V curve and effects of ion collisions.
- Добавил в систему: Волошин Дмитрий Григорьевич