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Nanomachining and design of array sensors on nanoporous alumina by chemical photolithographyдоклад на конференции
- Авторы: Boytsova O.V., Klimenko A.A., Lukashin A.V., Lebedev Vasiliy A., Napolskii K.S.
- Международная Конференция (Симпозиум) : Advanced metals, ceramics and composites, The 12-th China-Russia symposium on advanced materials and technologies (CRSAMT2013)
- Даты проведения конференции: 2013
- Тип доклада: не указан
- Докладчик: не указан
- Место проведения: Kunming
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Аннотация доклада:
Chemical photolithography has been exploited to fabricate micrometer-sized cantilevers in nanoporous anodized alumina. In particular we concentrated on the self-organization processes due to the synthesis and modification of film nanoporous anodic alumina (AAO) surface, which is promising as well as biosensors. The microstructured surface was obtained by combining anodization of Al-foil and photolithography on thin film of nanoporous Al2O3. Arrays sensors after chemical lithography were determined using atomic force microscopy and scanning electron microscopy.
- Добавил в систему: Бойцова Ольга Владимировна