Аннотация:We present here a new diagnostics based on using LiF crystal detectors that are able to perform measurements an intensity distribution of X-rays beams with diameters ranging from some microns up to some centimetres with high spatial resolution (~1 µm). In situ, 3D visualization of SACLA XFEL focused beam profile along propagation, including propagation inside photoluminescence solid materials, is demonstrated. Also, a high spatial resolution control a quality of targets used in optical laser pump—XFEL probe HEDS experiments is proposed.