Analysis of flows by deposition of diamond-like structuresстатья
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Дата последнего поиска статьи во внешних источниках: 1 апреля 2018 г.
Аннотация:The Direct Simulation Monte Carlo (DSMC) method is used to simulate the hydrogen–methane mixtures
flowing through a heated cylindrical tungsten tube and expanding into a low-pressure chamber
in the substrate holder direction. The DSMC method takes into account heterogeneous reactions
in the tube and on the substrate surface. The results of DSMC simulation are used for the chemical
kinetics calculations, i.e., axial distributions of species concentrations in various H/C mixtures.
The effects of various parameters (reactor configuration, flow rate, initial concentration of methane
in the mixture with hydrogen, and pressure in the chamber) on species fluxes to the substrate, the
degree of hydrogen dissociation, the degree of methane decomposition, and further conversion of
CxHy components up to atomic carbon C are numerically studied. The developed method provides
a possibility of solving similar problems for nonequilibrium flows.