Местоположение издательства:New York, N.Y., United States
Первая страница:48
Последняя страница:52
Аннотация:A new approach has been suggested for solving the problems of analysis and interpretation of video signals of a scanning electron microscope (SEM) and other microprobe devices based on a morphological analysis of images, the theory of calculating and measuring systems of superhigh resolution and a quantitative model of beam-solid interaction, which takes account of various interaction channels. The efficiency of applying the suggested methods has been shown.