Effects of W and Mo crystalline texture on the angular distribution of sputtered atomsстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:The effects of W and Mo surface crystalline texture on the angular distribution of sputtered atoms were investigated experimentally and by computer simulation. A small-sized planar DC magnetron was used to sputter the target by 200-300 eV Ar(+) ions. The crystalline texture was formed under rolling of metal foils and during the preparation of metal bars and was controlled by X-ray diffraction analysis. For W and Mo foils, a strong anisotropy of the angular distribution was found. The character of angular distribution was different in the planes oriented perpendicularly and in parallel to the direction of rolling. In the first case, the angular distribution was peaked at the polar angle theta = 0, while in the second case, the angular distribution, in addition to a maximum at theta = 0, revealed a pronounced maximum at theta approximate to 57 degrees and approximate to 60 degrees for Mo and W, respectively. For bars, no azimuthal anisotropy was observed, but the angular distribution was peaked at theta = 37 degrees (Mo) and theta = 45 degrees (W). This is in contrast to the case of non-textured Mo and W polycrystals, for which the angular distribution had a maximum at theta = 0. Computer simulation technique in combination with the results of X-ray analysis was used to clarify the above experimental findings. It was demonstrated that the angular distribution of sputtered atoms can be successfully used for the determination of the crystalline texture of metals.