On the effect of the crystal structure in the sputtering of two-component single-crystal structures

Samoilov, V.N.; Ananieva, N.G.

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Дата последнего поиска статьи во внешних источниках: 12 января 2022 г.

Авторы: Samoilov V.N., Ananieva N.G.
Журнал: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
Том: 13
Номер: 4
Год издания: 2019
Издательство: Pleiades Publishing, Ltd
Местоположение издательства: Road Town, United Kingdom
Первая страница: 780
Последняя страница: 785
DOI: 10.1134/S1027451019040323
Аннотация: 6 pages, 4 figures, 1 table. The transmission sputtering of component atoms under ion bombardment of the (0001) face of a two-component VSi2 single crystal is studied using molecular-dynamics computer simulation. The sputtering of component atoms is calculated in the case of the sputtering of virtual VV'2 and Si'Si2 single crystals consisting of atoms with the same masses, and the following new effect in the selective sputtering is studied: atoms from vanadium sites are preferentially transmission sputtered in the case of the same masses and binding energies of component atoms. This effect can be called the effect of nonidentity of the component sites in the complex VSi2 lattice (of the C40 type) with respect to the momentum propagation in collision cascades, i.e., the effect of structure in the selective sputtering of two-component single crystal targets. Keywords: sputtering, ion transmission, selective sputtering, transmission sputtering, two-component targets, VSi2, thin single crystal films.
Добавил в систему: Самойлов Владимир Николаевич

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On the effect of the crystal structure in the sputtering of two-component single-crystal structuresстатья

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