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Theoretical and experimental study of the Josephson effect in SN-N-NS submicron structuresстатья
- Авторы: Baryshev Iu P., Vasil’Ev A.G., Dmitriev A.A., Kupriianov M.Iu, Lukichev V.F.
- Сборник: Problems of Lithography in Microelectronics
- Год издания: 1987
- Первая страница: 136
- Последняя страница: 146
- DOI: Bibliographic Code: 1987plme.book..136B
- Аннотация: The influence of the proximity effect in electrodes on the stationary properties of SN-N-NS bridges of variable thickness is investigated in the context of the microscopic theory of superconductivity. By using a refined theory, the parameters of these structures are optimized, and promising candidate materials are proposed for the fabrication of the bridge connectors. A process for the fabrication of SN-N-NS bridges is developed which is based on double electron lithography and makes it possible to produce weak bonds with a minimum dimension of 0.25 micron. Nb-Al-Nb bridges exhibiting the Josephson effect have been fabricated and characterized.
- Добавил в систему: Куприянов Михаил Юрьевич