Estimates related to the error self-compensation mechanism in optical coatings depositionстатья
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Дата последнего поиска статьи во внешних источниках: 7 марта 2019 г.
Аннотация:This paper introduces an estimate for the strength of the correlation of layer thickness errors in the process of coating deposition with broadband optical monitoring. It is shown that a strong effect of self-com- pensation of deposition errors is observed in the case of a strong correlation of layer thickness errors. An esti- mate for the strength of this effect is introduced. Theoretical conclusions are confirmed by comparison with practical deposition results that demonstrate the presence of a strong self-compensation effect.