Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

Baklanov, M.R.; Jousseaume, V.; Rakhimova, T.V.; Lopaev, D.V.; Mankelevich, Y.A.; Afanas'ev, V.V.; Shohet, J.L.; King, S.W.; Ryan, E.T.

Авторы: Baklanov M.R., Jousseaume V., Rakhimova T.V., Lopaev D.V., Mankelevich Yu A., Afanas'ev V.V., Shohet J.L., King S.W., Ryan E.T.
Журнал: APPLIED PHYSICS REVIEWS
Том: 6
Номер: 1
Год издания: 2019
Первая страница: 011301
DOI: 10.1063/1.5054304
Аннотация: This paper presents an in-depth overview of the application and impact of UV/VUV light in advanced interconnect technology. UV light application in BEOL historically was mainly motivated by the need to remove organic porogen and generate porosity in organosilicate (OSG) low-k films. Porosity lowered the film’s dielectric constant, k, which enables one to reduce the interconnect wiring capacitance contribution to the RC signal delay in integrated circuits. The UV-based low-k film curing (wavelength > 200nm) proved superior to thermal annealing and electron beam curing. UV and VUV light also play a significant role in plasma-induced damage to pSiCOH. VUV light with wavelength < 190–200nm is able to break Si-CH3 bonds and to make low-k materials hydrophilic. The following moisture adsorption degrades the low-k properties and reliability. This fact motivated research into the mechanisms of UV/VUV photon interactions in pSiCOH films and in other materials used in BEOL nanofabrication. Today, the mechanisms of UV/VUV photon interactions with pSiCOH and other films used in interconnect fabrication are fairly well understood after nearly two decades of research. This understanding has allowed engineers to both control the damaging effects of photons and utilize the UV light for material engineering and nanofabrication processes. Some UV-based technological solutions, such as low-k curing and UV-induced stress engineering, have already been widely adopted for high volume manufacturing. Nevertheless, the challenges in nanoscaling technology may promote more widespread adoption of photon-assisted processing. We hope that fundamental insights and prospected applications described in this article will help the reader to find the optimal way in this wide and rapidly developing technology area.
Добавил в систему: Лопаев Дмитрий Викторович

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Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic modelsстатья