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Sensitivity of the ellipsometric angles Psi and Delta to the surface inhomogeneityтезисы доклада
Информация о цитировании статьи получена из
Web of Science,
Scopus
Дата последнего поиска статьи во внешних источниках: 31 декабря 2013 г.
- Авторы: Tikhonravov A.V., Trubetskov M.K., Masetti E., Krasilnikova A.V., Kochikov I.V.
- Сборник: Proceedings of SPIE, Advances in Optical Interference Coatings
- Том: 3738
- Тезисы
- Год издания: 1999
- Первая страница: 173
- Последняя страница: 182
- DOI: 10.1117/12.360078
- Аннотация: Recently a new approximation for the ellipsometer angles of a slightly inhomogeneous thin film was developed. This approximation enables performing a more detailed qualitative analysis of ellipsometric angles than the widely used approximation assuming the linear bulk inhomogeneity. In particular, the new approximation describes not only the impact of inhomogeneity on the ellipsometric angle (Psi) but also its impact on the ellipsometer angle (Delta) . This paper reports specific properties of ellipsometric spectra connected with the surface micro-roughness. In the particular case of fluoride films the ellipsometric angle (Delta) turns to be quite sensitive to this type of inhomogeneity if ellipsometric measurements are performed at high angles of incidence.
- Добавил в систему: Тихонравов Александр Владимирович