Erosion of the sputtered electrodes in the surface barrier dischargeстатьяИсследовательская статья
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Дата последнего поиска статьи во внешних источниках: 4 мая 2020 г.
Аннотация:The paper is devoted to a phenomenological study of the modification of sputtered
electrodes in a surface dielectric barrier discharge in atmospheric air. A decrease in the power
supplied to the discharge in the case of using platinum and aluminum electrodes and an
increase in the case of using a copper electrode were demonstrated. It is shown that during
long-term operation of the electrode system, a decrease in its cold capacitance is observed.
These effects are assumed to be due to the degradation of the electrode material, transfer of
erosion products to the surface of the dielectric, as well as morphological changes at the
electrode edge.