Effect of structure and deposition technology on tribological properties of DLC coatings alloyed with VIA group metalsстатья
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Дата последнего поиска статьи во внешних источниках: 28 октября 2016 г.
Аннотация:The results of a comprehensive research on atomic structure, phase composition, micromechanical and tribological characteristics of alloyed DLC coatings have been presented. The coatings have been deposited by reactive magnetron sputtering in acetylene-nitrogen gas mixtures of different compositions (a-C:H:Cr), by plasma-assisted chemical vapor deposition in atmospheres of silicone-organic precursor gases (a-C:H:Mo:Si), and by nonreactive magnetron sputtering of a composite target (a-C:H:W).