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RF plasma probe diagnostics: a method of eliminating measurement errors for Langmuir probes with bare protective shieldsстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 6 февраля 2020 г.
- Авторы: Riaby V.A., Masherov P.E., Savinov V.P., Yakunin V.G.
- Журнал: Journal of Physics: Conference Series
- Том: 958
- Номер: 012006
- Год издания: 2018
- Издательство: IOP Publishing
- Местоположение издательства: [Bristol, UK], England
- Первая страница: 012006-1
- Последняя страница: 012006-14
- DOI: 10.1088/1742-6596/958/1/012006
- Аннотация: This work demonstrates the measurement errors for probe diagnostics in radio-frequency (RF) plasma using Langmuir probes that have bare protective shields and the way of their eliminations. The parameters of xenon inductive plasma were measured with two different in forms and locations cylindrical Langmuir probes that had reference probes and bare protective shields. Accurate probe diagnostics using an advanced probe station VGPS-12 featuring precise determination of plasma electron energy distribution functions (EEDFs) and plasma parameters enabled effective quantitative evaluations of EEDF deviations from the Maxwell function. They were considered to be EEDF distortions that linearly depended on the lengths of the probe’s protective shields and were minimal for one of the probes when its shield’s length was zero in the special point of the discharge space. Comparison of measurement data in this special point identified the principled relationship between measurement errors and EEDF distortions, which enabled correction of all measured plasma parameters using previously determined radial distributions of individual EEDF distortions. In the present work a method has been proposed that describes all these actions. In addition, consideration of plasma-shield interactions showed that the physical reason for the measurement errors was a short-circuited double-probe phenomenon in the bare protective shields caused by longitudinal variations of plasma potentials
- Добавил в систему: Рябый Валентин Анатольевич