Acceleration of ions in a plasma accelerator with closed electron drift based on a capacitive radio-frequency dischargeстатьяИсследовательская статья
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Дата последнего поиска статьи во внешних источниках: 11 ноября 2020 г.
Аннотация:The dependence of the average energy of ions at an output from a radio-frequency plasma source with the geometry of a plasma accelerator with closed electron drift has been experimentally investigated. It has been shown that the area of existence of a radio-frequency discharge is wider in comparison with the direct current mode. If the discharge circuit does not allow passage of direct current, the average ion energy varies in the range of 40–90 eV. Using an open for DC discharge circuit results in an increase in the average ion energy E up to 150–340 eV. Out of three investigated working gases (Kr, Ar, Air), the highest values of E have been obtained using Kr, the lowest values of E are typical for the discharge in air.