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Influence of H2O2 concentration on the structural and photoluminescent properties of porous silicon nanowires fabricated by metal-assisted chemical etchingстатья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 4 июня 2021 г.
- Авторы: Gonchar Kirill A., Moiseev Daniil V., Bozhev Ivan V., Liubov A.Osminkina
- Журнал: Materials Science in Semiconductor Processing
- Том: 125
- Год издания: 2021
- Издательство: Elsevier Ltd.
- Местоположение издательства: Amsterdam, Netherlands
- Первая страница: 1
- Последняя страница: 6
- Номер статьи: 105644
- DOI: 10.1016/j.mssp.2020.105644
- Аннотация: Porous silicon nanowires (PSi NWs) are a promising material for applications in sensorics, photovoltaics, and biomedicine. However, the structural and optical properties of PSi NWs are extremely sensitive to the concentrations of chemical solutions used in their manufacture. In this study, PSi NWs were fabricated by a two step metal-assisted chemical etching method from highly doped crystalline silicon wafers with a resistivity of <0.005 Ω cm. It was shown that the structural and optical properties of the obtained samples depend on the concentration of hydrogen peroxide (H2O2), which in our experiments varied from 5 to 30%. As a result of etching, a layer of NWs with a diameter of 50–200 nm is obtained from above, and a thin layer of porous silicon is obtained from below. The ratio of the thicknesses of these two layers can be tuned by choosing the required concentration of H2O2. The porosity of the samples, calculated in the approximation of the effective Bruggeman medium from the IR reflection spectra, was 40–50%. Electron microscopy demonstrated the presence of a large amount of silicon nanocrystals in the volume of PSi NWs, which exhibited efficient visible photoluminescence due to quantum confinement effect. It was shown that the size of the nanocrystals can be also tunable on the used concentration of H2O2.
- Добавил в систему: Осминкина Любовь Андреевна
Прикрепленные файлы
| № | Имя | Описание | Имя файла | Размер | Добавлен |
|---|---|---|---|---|---|
| 1. | Полный текст | Conchar_MSiSemProc_SI_2021.pdf | 649,2 КБ | 24 ноября 2023 [OsminkinaLA] |