Current–pressure dependencies of dc magnetron discharge in inert gasesстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 11 марта 2017 г.
Аннотация:The current-pressure (I-P) characteristics of dc magnetron discharge in inert gases (Ar, Kr and Xe) for various constant discharge voltages were measured. Under certain conditions on I-P characteristic, the nonmonotonic region of local maximum followed by a minimum is observed. It is found that increasing mass of the working gas ions results in a shift of the local maximum to lower pressures. The spatial distribution of ions in the plasma was studied by optical emission spectroscopy. Transformation of the discharge spatial structure with pressure was observed. A qualitative model of the observed trends is presented. It takes into account the pressure dependence of the discharge spatial structure, the capturing of secondary electrons by the cathode and charge exchange effects.