Medium energy ion scattering spectroscopy: Study of germanium amorphization under ion irradiationстатья
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Дата последнего поиска статьи во внешних источниках: 24 апреля 2018 г.
Аннотация:An experimental setup for medium energy ion scattering spectroscopy allowing materials elemental composition diagnostics has been developed. A target composed of single-crystalline Ge with a smooth surface and structural inhomogeneity several nanometers thick has been prepared for conducting the experiments. Experiments have shown that the depth resolution of the method was 6 Å.