Местоположение издательства:New York, United States
Первая страница:39
Последняя страница:67
Аннотация:Some simplified models are used to computer-calculate the parametersof Cu single crystal sputtering by 1 keV Ar ions.Fach of the model is a confined structure of a perfect single crystalwith various numbers of atoms (from 2 to 34).The sputtering yields,the energy spectra and statial distributions of sputtered atoms are calculated at various energies of bombarded atoms.