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Sputtering mechanisms of polycrystalline platinum by low energy ionsстатья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 13 марта 2014 г.
- Авторы: Chernysh V.S., Eckstein W., Haidarov A.A., Kulikauskas V.S., Mashkova E.S., Molchanov V.A.
- Журнал: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
- Том: 160
- Год издания: 2000
- Издательство: Elsevier BV
- Местоположение издательства: Netherlands
- Первая страница: 221
- Последняя страница: 230
- DOI: 10.1016/S0168-583X(99)01171-4
- Аннотация: The results of an experimental study and a computer simulation with the TRIM.SP code of the angular distributions of atoms sputtered from polycrystalline platinum under 3–9 keV Ne+ bombardment at normal ion incidence are presented. It was found that angular distributions of sputtered atoms are overcosine and that their shape is practically independent of an ion energy. Comparison with the previously obtained data for He+ and Ar+ ions have shown that the shape of the angular distribution does not depend on the bombarding ion species. Good agreement between experimental results and computer simulation data was found. Computer simulations of the partial angular distributions of Pt atoms ejected due to various sputtering mechanisms for Ne ion bombardment were performed and the comparison with corresponding data for He and Ar bombarding was made. The role of different mechanisms in the formation of angular distributions of sputtered atoms has been analyzed.
- Добавил в систему: Машкова Евгения Сергеевна