Morphology and Raman Spectra Peculiarities of Chemical Vapor Deposition Diamond Filmsстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:The textured polycrystalline diamond films were obtained by a chemical vapor deposition (CVD)
from CH4/H2 gas mixture activated by a direct current (DC) discharge. The effect of CH4 concentration
on the morphology and the structural properties of the diamond films was investigated.
The transition from a faceted to a ballas-like diamond and an increase of the amount of graphitic
inclusions were observed with the increase of CH4 concentration. A scanning electron microscopy
(SEM) and a Raman spectroscopy were used to reveal the different stages of the morphology
and the composition transformation of the diamond films with the deposition parameters variation.
A selective thermal oxidation technique was used to investigate the internal structure of CVD films.