Hydrogen-Free CVD Deposition of Molybdenum Coatingsстатья
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Дата последнего поиска статьи во внешних источниках: 11 мая 2022 г.
Аннотация:Abstract—The structure and morphology of CVD molybdenum coatings in the MoCl5–Cd system on sub-strates made of copper, stainless steel (12Kh18N10T), and Inconel X750 and ZhS6U-VI high-temperaturealloys were studied by X-ray diffraction, scanning electron microscopy, and using thermodynamic calcula-tions by the Miedema model. A loose, porous, and thin (0.1 μm) coating was formed on the copper substrate,while uniform and continuous coatings were observed on Inconel X750, 12Kh18N10T, and ZhS6U-VI,which were 0.3, 0.7, and 1.0 μm thick, respectively. In the series of substrates M1–Inconel X750–12Kh18N10T–ZhS6U-VI, the deposition rate of molybdenum increases (from 0.1 to 1.0 μm/h), the size ofits crystallites decreases to 50 nm, and lattice microdistortions increase to 0.16%. The rate of deposition of themolybdenum coating based on the MoCl5–Cd mixture is consistent with the negative enthalpy of formationof intermetallic compounds of the equiatomic composition MeMo (where Me is the substrate metal), calcu-lated by the Miedema model. The differences observed in the series of M1–Inconel X750–12Kh18N10T–ZhS6U-VI in the deposition kinetics, morphology, structure, and substructure of the obtained coatings areexplained from the standpoint of the enhancement of the adsorption interaction between the substrate andMoCl 5 and the chemical affinity of the substrate and molybdenum