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Restructuring in Block Copolymer Thin Films: In-Situ GISAXS Investigations During Solvent Vapor Annealingстатья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 11 апреля 2017 г.
- Авторы: Posselt D., Zhang J., Smilgies D.M., Berezkin A., Potemkin I.I., Papadakis C.M.
- Журнал: Progress in Polymer Science (Oxford)
- Том: 66
- Год издания: 2017
- Издательство: Elsevier BV
- Местоположение издательства: Netherlands
- Первая страница: 80
- Последняя страница: 115
- DOI: 10.1016/j.progpolymsci.2016.09.009
- Аннотация: tBlock copolymer (BCP) thin films have been proposed for a number of nanotechnologyapplications, such as nanolithography and as nanotemplates, nanoporous membranes andsensors. Solvent vapor annealing (SVA) has emerged as a powerful technique for manip-ulating and controlling the structure of BCP thin films, e.g., by healing defects, by alteringthe orientation of the microdomains and by changing the morphology. Due to high timeresolution and compatibility with SVA environments, grazing-incidence small-angle X-rayscattering (GISAXS) is an indispensable technique for studying the SVA process, providinginformation of the BCP thin film structure both laterally and along the film normal. Espe-cially, state-of-the-art combined GISAXS/SVA setups at synchrotron sources have facilitatedin situ and real-time studies of the SVA process with a time resolution of a few seconds,giving important insight into the pathways and mechanisms of SVA induced restructuring.We give a short introduction to the GISAXS method and review recent theoretical studies,experimental techniques such as sample preparation and in situ chambers together withSVA protocols, and we review and discuss experimental results. We conclude by giving anoutlook on emerging developments of the in situ real-time GISAXS scattering technique incombination with new approaches to control BCP thin film structures using SVA.
- Добавил в систему: Потемкин Игорь Иванович