Аннотация:A review of fundamental mechanisms of laser-induced formation
of nano- and microstructures of surface relief in semiconductors
and metals in air and in liquid environment is presented. Two
classes of laser-induced surface relief instabilities occurring in
solid and in liquid (molten) phases are considered. For a solid
phase it is demonstrated that a laser (or ion) beam-created
stressed flat isotropic surface layer with laser-generated mobile
point defects exhibits a threshold (in respect to the defect
concentration) transition to a spatially periodically bent state
with a simultaneous formation of the periodic defect piles up
at the extrema of the spontaneously emerging surface relief
(the defect-deformational (DD) instability). The layer deformation
corresponds to the displacements in a static bending quasi-Lamb
wave and the deformation of an underlying elastic continuum corresponds to the displacements in a static quasi-Rayleigh wave.
It is shown that the DD self-organization is described by the closed
isotropic nonlinear DD Kuramoto–Sivashinsky (DDKS) equation.
Results of detailed analytical and numerical investigations of
the isotropic DDKS equation are presented and compared with
experiment. More general analysis simultaneously involving the
nonlocal surface strain dependence of the force acting on defects
and both (normal and lateral) defect-induced forces that cause
the bending of the surface layer yields two maxima on the
curve of the DD instability growth rate versus the period of
the generated relief. This corresponds to the experimentally
observed two scales of the surface relief modulation upon
the laser and ion-beam irradiation of semiconductors. Based
on the results obtained, a cooperative DD mechanism of the
formation of an ensemble of the nanoparticle nucleation centres is
proposed. A new approach to the calculation of the experimentally
observed bimodal size distribution function of the nanoparticles
is developed adequate to the DD mechanism of nucleation that
expresses the distribution function through the growth rate.
Nonlinear three DD grating interactions are shown to lead to the
generation of second harmonic of surface relief and mixing of
the DD grating wave vectors. The DD structures’ symmetry and
their evolution with increasing laser fluence and magnitude of
laser-induced anisotropic stress are considered on the basis of the
linear anisotropic DD model and the anisotropic DDKS equation.
The developed theory of the DD instability of the surface layer is
applied for the interpretation of experimental results obtained in
studies of the formation of ordered nano- and microstructures on
the surface of semiconductors and metals under the action of laser
pulses with different durations and fluencies in air and in liquid
confinement. Similarities with the formation of nanostructures
under ion-beam irradiation are also discussed in the framework
of DD instability theory. On the basis of the DD model, the
interpretation of sub-wavelength ripple formation is given. For the
molten state a closed nonlinear two-dimensional hydrodynamic
Kuramoto–Sivashinsky (HDKS)-type equation for the modulation
of the thickness of the laser pulse-induced molten layer is derived.
It is shown that in liquid environment, when the temperature
gradient at the surface is directed from the surface to the bulk the thermocapillary instability of surface relief arises leading
to the formation of surface relief structures with wavelength
September 22, 2011 15:50 PSP Book - 9in x 6in 01-Yang-c01
Introduction 3
proportional but an order of magnitude larger than the thickness
of the molten layer. Computer simulations of the HDKS equation
predict the subsequent formation of lamellar and disordered
(quasi-hexagonal) structures of surface relief when the time of
irradiation is increased. The obtained results are used for the
interpretation of experimental data on the formation of lamellar
and quasi-hexagonal surface relief microstructures upon multiple
nanosecond pulse laser irradiation of silicon inwater confinement.