Место издания:Общество с ограниченной ответственностью "Буки Веди" Суздаль
Первая страница:164
Последняя страница:166
Аннотация:Using hydrogen-free CVD technology in the TaBr5-Cd-He system, pure tantalum coatings with high protective corrosion properties and high adhesion strength to the substrate were obtained. The formation in SFin α-Ta and the formation of the metastable β-Ta phase are discussed in connection with the kinetics, deposition mechanisms, and protective properties of the resulting coating.