Quasi-one-dimensional distribution of macropores in anodically etched uniaxially stressed silicon platesстатья
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Дата последнего поиска статьи во внешних источниках: 29 ноября 2013 г.
Аннотация:Gradual transition from quasi-hexagonal to quasi-one-dimensional order was experimentally observed in an arrangement of macropores etched on the surface of a Si(100) plate inhomogeneously strained by bending. The observed phenomenon is theoretically described within the framework of a defect-deformation mechanism of the formation of ordered ensembles of seeding pores in etched semiconductors and metals