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STRUCTURE AND PROPERTIES OF THE (Cr, Al)N COATINGS DEPOSITED BY PIII&D METHODстатья
- Авторы: Vasyliev V.V., Luchaninov A.A., Reshetnyak E.N., Strel’nitskij V.E., Lorentz B., Reichert S., Zavaleyev V., Walkowicz J., Sawczak M.
- Журнал: Problems of Atomic Science and Technology, Series: Plasma Physics
- Том: 6
- Номер: 22
- Год издания: 2016
- Первая страница: 244
- Последняя страница: 247
- Номер статьи: 1562-6016
- Аннотация: Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investi- gated. Influence of the amplitude of pulsed substrate bias potential in the range of 0...2500 V on the structure and mechanical properties of the coatings was studied. It is found that in all coatings formed solid solution of (Cr, Al)N with a cubic structure type NaCl. High voltage pulsed potential bias causes formation of the coatings structure with fine grains (6...7 nm) and strong axial texture [110]. Residual compressive stress varies nonmonotonously from 2 to 7 GPa when the amplitude of the pulses increases. The coatings are characterized by high hardness 30...36 GPa, the surface roughness at the level of 40...50 nm and a low friction coefficient, which allows their use as protective coatings for tools and friction units.
- Добавил в систему: Завалеев Виктор Анатольевич