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Updating of the Toroidal Electron Spectrometer Intended for a Scanning Electron Microscope and Its New Applications in Diagnostics of Micro- and Nanoelectronic Structuresстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 18 декабря 2013 г.
- Авторы: Gostev A.V., Orlikovskii N.A., Rau E.I., Trubitsyn A.A.
- Журнал: Technical Physics
- Том: 58
- Номер: 3
- Год издания: 2013
- Издательство: Maik Nauka/Interperiodica Publishing
- Местоположение издательства: Russian Federation
- Первая страница: 447
- Последняя страница: 454
- DOI: 10.1134/S1063784213030109
- Аннотация: A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The topology control of 3D microstructures by backscattered electron tomography is exemplified. A high efficiency of secondary electron energy filtering in monitoring of semiconductor regions locally doped by p- and n- type impurities is demonstrated. A physical substantiation for the high contrast of the doped regions is given. The feasibility of taking electron spectra using a scanning electron microscope in a wide range from slow secondary electrons to elastically scattered ones is proved.
- Добавил в систему: Рау Эдуард Иванович