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Experimental observation of the neutral gas flow along the racetrack of running planar magnetronстатья
- Авторы: Filippov A.V., Pal A.F., Ryabinkin A.N., Serov A.O.
- Сборник: In: VII Int. Conf. Plasma Physics and Plasma Technology. Contributed Papers
- Год издания: 2012
- Место издания: Minsk, Belarus
- Первая страница: 17
- Последняя страница: 21
- Аннотация: The experiment shows existence of neutral gas flow in DC magnetron plasma in the direction of the electron drift in crossed fields. The result was obtained by investigation of the propagation of the small gas admixture in the plasma along the discharge ring in both directions. Magnetron discharge was sustained in argon inside the ring-shaped chamber over the flat cathode. The sputtering track circumference was 0.6 m and the discharge power was up to 400 W. The xenon admixture was pulse-injected into the discharge ring from a smallish injection port. The time dependencies of characteristic admixture atomic radiation intensity were obtained for several short plasma ring sections. These dependencies were found to be substantially different for the sections situated on the opposite sides from the admixture injection port. If we change the magnetic field direction to opposite one, the dependencies change places. These facts prove the existence of circulating gas flow inside the chamber. The modeling of processes of charged and neutral species interaction in the magnetron plasma was carried out and the profile of the gas flow in the direction of the drift was calculated. The convective diffusion problem was solved taking into account the profile as a condition. The gas flow velocity values up to 1.5 m/s were obtained from the comparison of the experimental time dependencies with those obtained from numerical convective diffusion problem solution.
- Добавил в систему: Серов Александр Олегович