Аннотация:The regularities of superhard carbon nanocomposite (CNCs) growth on a titanium substrate using accelerated C60 ion beam are investigated. Substrate temperature Ts and ion energy E are the main parameters varied during film growth. The formation of CNC coatings with a specific electrical resistance below 1 Ω × m is observed at a substrate temperature Ts above 300 ºC and ion energies from 5 to 8 keV. CNC coatings obtained at Ts in the range of 300–400 ºC consist of graphite crystals with a size of 1–2 nm enclosed in a diamond-like matrix. The sp2/sp3 bond ratio weakly depends on Ts in this temperature range and slightly decreases with ion energy increase (from 0.33 to 0.26 at 5–8 keV). Diamond-like coating grows on a substrate at Ts lower than 300 ºC by 5 and 7 keV ions. At an ion energy of 8 keV and above sputtering of the substrate was found. In all cases a TiC layer is formed at the substrate-coating interface due to the ion-beam mixing. Formation of this interlayer provides good adhesion of the coating to the substrate. The CNC coating on Ti exhibits high corrosion resistance and good protective properties. Thus, composite carbon films could be used as a conductive electrode in various chemical and bio applications.