Место издания:Chinese Ceramic Society, Beijing, China
Первая страница:51
Последняя страница:56
Аннотация:Gas release from silica glasses of crucibles for silicon crystal growth has been researched by mass spectrometry. The basic impurity in all investigated glasses is water (structural OH-groups and molecular water). Diffusion coefficients for the evolution water impurity have been determined at 800-1400 C. Silica glasses used for manufacture of large single silicon crystals should be characterized by the minimal water and gas content and by the minimal diffusion coefficient.