Single-crystal diamond microneedles shaped at growth stageстатья
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Дата последнего поиска статьи во внешних источниках: 20 мая 2014 г.
Аннотация:Single-crystal diamond microneedles were extracted from (001) textured polycrystalline films. The films were produced using a plasma enhanced chemical vapor deposition (CVD) from a CH4/H2 gas mixture activated by a direct current discharge. The as-grown textured polycrystalline CVDfilms consist of pyramid-shaped micrometer size diamond crystallites embedded into a nanodiamond ballas-like material. The less ordered fraction of the CVD film material was removed selectively using thermal oxidation. A dependence of the diamond needle shape on
the CVD and the oxidation process parameterswas revealed via a computer simulation and experimental studies. Ability for mass production of the diamond microneedles of different shapeswas demonstrated. The needles are suitable for various applications from microcutting tools to quantum information processing.