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Consideration of the Distribution of Noise Level by Wavelength in Broadband Control of the Optical Coating Deposition Processстатья
Информация о цитировании статьи получена из
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 17 апреля 2024 г.
- Авторы: Sharov A.N., Sharapova S.A., Tikhonravov A.V., Yagola A.G.
- Журнал: Moscow University Physics Bulletin
- Том: 79
- Номер: 1
- Год издания: 2024
- Издательство: Allerton Press
- Местоположение издательства: New York, N.Y., United States
- Первая страница: 1
- Последняя страница: 6
- DOI: 10.3103/S0027134924700048
- Аннотация: In the study, numerical results of simulations for the deposition process of a complex optical coating are presented, utilizing broadband monitoring of this process in the case where the noise level in the measured transmittance coefficient has a non-uniform distribution across the wavelength. The influence on the accuracy of control data at the edges of the measured wavelength range, where the error in the transmittance coefficient is maximal, is investigated. It is shown that the removal of some data at the edges of the range almost does not change the self-compensation factor of the errors in the deposition process, while the average norm of the error vector in the layer thicknesses significantly decreases. Thus, for the first time, it is demonstrated that taking into account the effect of error self-compensation in broadband control opens the possibility of a reasonable choice of the optimal spectral range for practical optical control.
- Добавил в систему: Шаров Александр Николаевич