Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Fieldстатья
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Дата последнего поиска статьи во внешних источниках: 8 мая 2024 г.
Аннотация:The properties of an inductive RF discharge placed in a longitudinal external magnetic field withan induction of less than 70 G at frequencies of 2, 4, and 13.56 MHz are studied. The dependences of theregion of existence of the discharge, the efficiency of the RF power input and the structure of the RF mag-netic field on the external magnetic field induction are studied experimentally. The experimental results arecompared with calculations based on a previously developed electromagnetic discharge model. It is shownthat the local maximum of the plasma density observed at weak magnetic fields is associated with the resonantexcitation of waves in the plasma source. The excited wave is close to a transverse helicon at a frequency of2 MHz, and its properties approach the Trivelpiece–Gould wave at a frequency of 13.56 MHz