IMPROVED ANGLE AND ENERGY RESOLVED SECONDARY ION SPECTROMETERстатья
Информация о цитировании статьи получена из
Scopus,
Web of Science
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 31 октября 2014 г.
Аннотация:An apparatus for angle and energy resolved SIE with improved characteristics is designed and created. The apparatus is based on the concept of a movable energy analyser with fixed mass analyser. The energy analyser consists of a first forming 5 element lens, 180-degrees hemispherical electrostatical deflector, 90-degrees hemispherical electrostatical deflector, and transport lenses. The transmission energy bandwidth is kept constant. The sputtered secondary ions are registered within a solid angle of OMEGA = 6-degrees. The polar angle of registration may be varied from theta = 15 to 90-degrees.