Noncontact determination of thin films conductance by SHo plate acoustic wavesстатья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
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Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 16 февраля 2016 г.
Аннотация:The paper is devoted to the development of noncontact acoustic method of the determination of
thin film conductance by using shear-horizontal zero order (SH0) acoustic waves in thin
piezoelectric plates. The method is based on the registration of changes in velocity and attenuation
of acoustic waves in a piezoelectric plate due to placing the structure “film under study–dielectric
substrate” on the certain distance from the plate. The limits of measured values by the
suggested method are determined. The theoretical data are compared with the experimental results.