Effect of nitrogen and ammonia on transfer and deposition of hydrocarbon radicals in different regions of hollow-cathode glow dischargeстатья
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Аннотация:The effect of addition of nitrogen or ammonia in an amount equal to the flow of methane entering as a 7: 1 H-2/CH4 mixture into a hollow-cathode dc glow flow discharge on the rate of deposition/erosion of amorphous hydrocarbon (a-C:H) films at 300 K has been studied. The introduction N-2 or NH3 into the mixture facilitates the transition from deposition to erosion of a-C(N):H films in the hollow cathode, but has a little effect on the growth rate of a-C(N):H films in the positive column and in the afterglow of the discharge. It has been suggested that the changes in the a-C:H film deposition/erosion rate are due to the formation of hydrogen cyanide, mainly, on the hollow-cathode surface.