MRS Symposium Proceedings, Volume 564, Advanced Interconnects and Contactsсборник
Статьи, опубликованные в сборнике
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1999
In situ XPS study of interaction of thin IVA, VA metal films with native oxide on Si substrates
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Sushkova N.M.,
Akimov A.G.
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в сборнике MRS Symposium Proceedings, Volume 564, Advanced Interconnects and Contacts, издательство MATERIALS RESEARCH SOC (506 KEYSTONE DR, WARRENDALE, USA, PA,15086), том 564, с. 223-228