International Conference "Micro- and Nanoelectronics - 2014". Book of abstractsсборник

Статьи, опубликованные в сборнике

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• • 2014 Experimental and computational thickness determination of ultra-thin surface films using backscattered electrons spectra in SEM
  • Kupreenko S., Orlikovsky N., Rau E., Tagachenkov A., Tatarintsev A.
  • в сборнике International Conference "Micro- and Nanoelectronics - 2014". Book of abstracts, место издания Moscow-Zvenigorod, Russia, тезисы, с. P1-30-P1-30
• • 2014 Impact of structural changes in e-beam negative resist hydrogen silsesquioxane (HSQ) to ecth-resistance at different doses of exposure
  • Ivanenko I.P., Kalnov V.A., Miakonkikh A.V., Orlikovsky N.A., Tatarintsev A.A.
  • в сборнике International Conference "Micro- and Nanoelectronics - 2014". Book of abstracts, место издания Moscow-Zvenigorod, Russia, тезисы, с. O1-13